Research
Plasma Core Technology
Plasma core technology is the technology used to generate plasma well, by applying voltage and current to raw materials (gas, liquid, solid), in various ways. It mainly identifies the properties to be controlled to achieve specific plasma functions, and researches technologies for generating and maintaining plasma suitable for these purposes.
Research Topics
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01
Research on Waste treatment technology using high-temperature plasmas
Research on Waste treatment technology using high-temperature plasmas
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02
Research on Synthesis technology for large area diamond formation
Development of a microwave plasma synthesis device for synthesizing diamond substrate to be used in future semiconductor devices, technology to expand the existing equipment limit of 100 mm to 150 mm or more, and develop a new generation source with no area limitation
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03
Research on the Plasma source technology for a linear ECR plasma source
Enlarging the generation of ECR plasmas that can form high-quality thin films in high vacuum, developing innovative plasma generation technology that can be used for electrodes in energy storage devices or large-area display processes
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04
Research on plasma powder treatment technology
Technology that uses plasma to modify the surface shape of powders or to improve the quality of the powder-utilizing process by modifying its surface properties. Developing technology that can process a large amount of powder using MW plasmas or dielectric barrier discharge plasmas
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05
Research on high-efficiency plasma generation technology
Development of new plasma generation technology to enable large-area treatment for environmental applications
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06
Research on structure modification and synthesis of organic compounds using plasma treatment
Plasma treatment technology of natural products for the development of high value-added biomaterials and the study of the interaction between plasma and biomaterials
Research Equipment
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