Achievements
Achievements
2022Plasma Technology Research Plasma Big Data ICT Convergence Technology Research Project
| Research Achievements | Plasma Big Data ICT Convergence Technology Research Project | |
|---|---|---|
| Research Overview | - Convergence of plasma big data and ICT technology to develop plasma data production and data utilization/sharing technology that can be used in high-tech industries to build a plasma comprehensive platform to solve national issues and improve the quality of life | |
| Research Contents |
- (Development of Plasma data production technology development and Data production) Acquisition of plasma properties and plasma-material reaction data of alternative candidate gases for carbon neutral realization response industrial process innovation - (Development of Plasma research data collection system) Systematic management of data generated in the process of technology development in the research center to realize practical functions desired by researchers by breaking through the limitations of existing database construction - (Development of data-based equipment intelligence technology) Convergence of computational science-based modeling and simulation technology and sensor/big data/computing-based high-performance/high-reliability plasma process monitoring and control element technology |
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| Major Research Achievements |
- Development of spectroscopic reference data-based plasma spectroscopic analysis techniques and development and registration of reference standards for plasma spectroscopic properties - The world's first measurement of total scattering cross section of C3F6O molecules by electron collision and publication of article - DFT calculation for basic physical properties such as structure and energy for 4 alternative compounds of SF6/PFC/HFC (2 types of C3H2F6 isomers, c-C6F6, C3F8O), related theoretical data, electron collision cross section data, electron transport coefficient and electron-molecular chemical reaction coefficient data set secured - Korea's first plasma-only research data repository design and implementation (https://pida.kfe.re.kr) - Operation of the only plasma property data collection and free provision system in Korea - Development of a sensor that can virtually measure the plasma state (electron density, electron temperature) of the OES sensor itself |
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| Expected effect | - Despite the very high demand in the industry, it can be used in the industry by preemptively securing through research on plasma process property data that is not available worldwide | |
| Image |
 <Fig. 1> Development of standard reference data (SRD) for spectral properties of Ar and N2 plasmas for the first time in Korea |
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 <Fig. 2> The measurement result of the total scattering cross section (TCS) of C3F6O molecule by electron collision (energy range of 15 eV to 90 eV) |
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 <Fig. 3> Plasma information and data management system |
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 <Fig. 4> Development of smart sensor that can be monitoring, recognizing, and judgement of plasma condition |
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